Bộ tinh chỉnh stage, linh kiện cơ khí
Bộ tinh chỉnh động cơ stage TA
Basic parameters: Type automatic slide Material Aluminum-black acid-resistant treatment sensor Limit + origin Motor characteristics: Two-phase stepper motor Five-phase stepper motor Rail type: Linear Ball Guide Repeatability Resolution: 5um 2um Transfer method Ball screw rod Positioning accuracy 15um